Abstract

The emerging paradigms of the Beyond-5G, 6G and Super-IoT will demand for high-performance Radio Frequency (RF) passive components, and RF-MEMS technology, i.e. Microsystems-based RF passives, is a good candidate to meet such a challenge. As known, RF-MEMS have a complex behavior, that crosses different physical domains (mechanical; electrical; electromagnetic), making the whole design optimization and trimming phases particularly articulated and time consuming. In this work, we propose a novel design optimization approach based on the Response Surface Method (RSM) statistical methodology, focusing on a class of RF-MEMS-based programmable step power attenuators. The proposed method is validated both against physical simulations, performed with Finite Element Method (FEM) commercial software tools, as well as experimental measurements of physical devices. The case study here discussed features 3 DoFs (Degrees of Freedom), comprising both geometrical and material parameters, and aims to optimize the RF performances of the MEMS attenuator in terms of attenuation (S21 Scattering parameter) and reflection (VSWR—Voltage Standing Wave Ratio). When validated, the proposed RSM-based method allows avoiding physical FEM simulations, thus making the design optimization considerably faster and less complex, both in terms of time and computational load.

Highlights

  • Significant part of current research in the fields of electronics, telecommunications and distributed sensing networks, falls under the umbrella of wide application paradigms, among which the Internet of Things (IoT)[1], the Internet of Everything (IoE)[2] and the ­5G3,4 are undoubtedly dominating

  • We chose as target device for this study an Radio Frequency (RF) passive component that is quite critical for the MIMOs and 6G applications mentioned above, that is a multi-state RF power attenuator

  • We proposed an innovative design optimization approach, orthogonal with respect to classical methodologies, based on the Response Surface Method (RSM), i.e. a common statistical methodology in which the system under observation is considered as a black box, with the controllable factors as inputs and the yields of interest as outputs

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Summary

Introduction

Significant part of current research in the fields of electronics, telecommunications and distributed sensing networks, falls under the umbrella of wide application paradigms, among which the Internet of Things (IoT)[1], the Internet of Everything (IoE)[2] and the ­5G3,4 are undoubtedly dominating. In order to confirm the RSM method, we test it by simulating points inside the considered range but not used to build the empirical model, and, as further proof, against the values obtained by experimental measurements of a physical device.

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