Abstract
The morphology and microstructure of evaporated CuInS 2 films is investigated with the emphasis on the effect of stoichiometry deviations. The compositions of In-rich and Cu-rich films obey the relations In 2S 3-CuInS 2 and CuS-CuInS 2 in the ternary phase diagram, respectively. In-rich films exhibit a platelet-like grain structure. This morphology can be explained by the formation of twin dislocations. Cu-rich films show a textured morphology with grain sizes in the range of 1–4 μm.
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