Experiments and global model of inductively coupled rf Ar/N2 discharges

Abstract

Experiments with a Langmuir probe and optical emission spectroscopy are carried out in inductively coupled rf (13.56 MHz) Ar/N2 discharges at three total pressures of 30, 60, and 110 mTorr, varying the Ar fractions from 50% to 95%. The electron energy probability functions (EEPFs) measured at all Ar fractions can be approximated using different exponentials in the bulk and high-energy regions, resulting in two temperature approximation of the measured EEPFs. The electron density slightly increases with increasing the Ar fraction at the Ar fractions below 70%, beyond which it relatively abruptly increases. On the other hand, the electron temperatures gradually decrease with the increase in the Ar fraction. The vibrational temperature does not strongly depend on the Ar fraction, whereas the rotational temperature gradually increases with the increase in the Ar fraction. The density of nitrogen atoms remains constant at the Ar fractions below 80%, beyond which it monotonically decreases with increasing the Ar fraction. A global model for electropositive plasma is used in order to investigate the plasma chemistry in Ar/N2 discharges assuming the Maxwellian electron energy distribution. The model results are compared with the experimental results, obtaining reasonably good agreement.