Abstract
Silicon tetrachloride (STC) is a byproduct gas produced in the manufacture of semiconductor-grade silicon. STC can be converted back to the feed gas for the chemical vapor deposition reactors that produce polysilicon by means of a hydrochlorination reaction. A mathematical model, based on the Kunii-Levenspiel fluidization model, was previously developed, that accurately predicted the conversion of STC to trichlorosilane (TCS) in a laboratory-scale fluidized bed reactor. This paper introduces modifications to the laboratory-scale model to make it suitable for use with a pilot-scale reactor. The model's ability to predict yield was compared to experimental studies completed in a pilot-scale reactor. It was shown that the modified mathematical model predictions were excellent, with an average percent difference of less than 4% between yield predicted and experimentally observed.
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