Abstract
Abstract Micro gears play an increasingly important role in various industrial applications, and the minimization of their deviations is challenging for metrology and manufacturing. A promising method is the focus variation technology, which enables areal measurements of micro gears. Practice-related standards are used to determine measurement uncertainties by comparison with calibration values. In this work, the external micro gear standard of the Physikalisch-Technische Bundesanstalt (PTB) is used to evaluate experimental measurement uncertainties of a focus variation coordinate measurement system for the first time. The traceable standard with modules between 0.1 and 1 mm is calibrated using micro tactile coordinate measurements. Optical and tactile measurements are then compared. As a result, small expanded measurement uncertainties of less than 4 µm are achieved.
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