Experimental test of models of high-plasma-density, radio-frequency sheaths

Abstract

Measurements of the rf-bias current and voltage applied to the substrate electrode of a high-density plasma reactor, combined with dc measurements of the ion current at the electrode and capacitive probe measurements of the plasma potential, enabled a rigorous, quantitative test of models of the electrical properties of the sheath adjacent to the electrode. The measurements were performed for argon discharges at 1.33 Pa (10 mTorr), ion current densities of 1.3--13 ${\mathrm{m}\mathrm{A}/\mathrm{c}\mathrm{m}}^{2}$, rf-bias frequencies of 0.1--10 MHz, and rf-bias voltages from less than 1 to more than 100 V. From the measurements, the current, voltage, impedance, and power of the sheath adjacent to the electrode were determined and were compared to model predictions. The properties of the opposing sheath, adjacent to grounded surfaces, were also determined. The behavior of the two sheaths ranged from nearly symmetric to very asymmetric. Changes in the symmetry are explained by models of the sheath impedance.