Abstract
A filter is a mainly component applied to reduce the discharge current low frequency oscillation in the range of 10–100 kHz. The only form of the filter in actual use involves RLC networks, whose design originates from the 1970s, but even now, researchers are unaware of the actual primary motivations for the resistor’s presence [S. Barral et al., AIAA Paper 2008-4632, 2008]. Therefore, the role of the resistor in the filter is experimentally studied and discussed through the analysis of control system and electric circuit theory. Experimental results and analysis indicate that the presence of a resistor makes the filter having the phase compensation function. The proper phase-angle and amplitude provided by the filter would increase or decrease the ion mobility and be helpful to balance the ion production in the discharge channel and then to decrease the fluctuation of the plasma density and lower the low frequency oscillation.
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