Experimental Study on the Cutting Performance of Ultra-Precision Micro Milling Machine

Abstract

To meet the requirement for the machining of the ultra-precision, ultra-smooth and micro-structure surface, an ultra-precision three axes micro milling machine was developed with the positioning accuracy better than ±0.25μm and the repetitive positioning accuracy better than ±0.2μm of all the three axes. The machine is proved to achieve the nanometer scale step response. Through milling experiments with micro-diameter tungsten carbide milling tool, the cutting performance has been further proved: the milling accuracy of 50μm-high step on the workpiece of aluminum alloy is better than ±0.3μm; and the 3D surface of pure copper workpiece is as smooth as mirror, with a roughness reaching 40nm. At last, the thin-walled structure of 10μm thickness on the workpiece of aluminum alloy is milled.