Abstract

We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method.

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