Abstract
Abstract The flammability limit of a chlorine trifluoride (CIF3)/dichlorosilane (SiH2Cl2)/nitrogen (N2) mixture was investigated experimentally. In this study, a SiH2Cl2/N2 mixture was first introduced into an explosion vessel and a CIF3/N2 mixture was then injected into the vessel. Spontaneous ignition was observed during the injection when the final CIF3/SiH2Cl2/N2 mxiture was in a flammable range. Various compositions were tested to determine the flammability diagram of a CIF3/SiH2Cl2/N2 mixture. From the flammability diagram, the lower flammability limits for spontaneous ignition were found to be 0.3 vol% for both CIF3 and SiH2Cl2. Below this limit ignition did not occur even when an electronic spark was applied.
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