Abstract
In order to study the damage area and morphology of silicon-based APD under different power density and different action time laser irradiation, based on two-dimensional microscopic measurement technology, the damage area and morphology of silicon-based APD were measured with laser power density and action time. The change. The results show that the damage area gradually increases with the increase of laser power density; with the increase of power density, APD produces surface peeling, wrinkles, cracks, pits and other damage effects.
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