Abstract
ABSTRACTThis paper presents a bi-directional friction linear micro-motor (BFLM), which is driven by a set of micro-actuator through friction drive. The BFLM has been fabricated using PolyMUMPs process. The forward and backward movement displacement, velocity and acceleration of the slider are measured. Movement velocities of the slider can be controlled by changing the driving frequency. It is feasible to use one set of actuator to driving the slider bidirectional motion. The BFLM is operated at square-wave frequencies with 38.39 kHz to get the maximum displacement of 100 µm and the average velocities are 10.709 µm/s in forward movement and 10.321 µm/s in backward movement.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
