Experimental study of SPR sensor performance enhancement by metal oxides

Abstract

With the widespread application of fiber surface plasmon resonance (SPR) sensors in the field of biochemical sensing, especially in the detection of large molecules such as proteins, the sensitivity of traditional fiber SPR sensors has made it difficult to meet the requirements of detection accuracy in practical applications. This article proposes and proves an effective method for selecting the optimal metal oxide material to improve the sensing performance of SPR sensors. Metal oxides (TiO2 and ZnO) can improve the sensitivity by enhancing the evanescent field of fiber SPR phenomenon. Through simulation, it was found that when the metal oxide film of the composite film sensor maintains the same thickness, the metal oxide with a high effective refractive index (RI) has a better improvement effect on the sensitivity of the SPR sensor. Experimental results show that the maximum RI sensitivity of TiO2 composite film sensors and ZnO composite film sensors in the RI range of 1.333–1.420 is 15,200 nm/RIU and 13,600 nm/RIU, respectively. Compared to silver-based sensors, RI sensitivity has increased by 16.92 % and 4.62 %, respectively. To further verify the enhancement effect of different metal oxides on fiber sensors, another layer of PDMS film is deposited on TiO2 and ZnO films. Within the temperature sensing range, the maximum temperature sensitivity of these two composite film temperature sensors is 4.9 nm/°C and 4.3 nm/°C, respectively. Overall, metal oxides with high RI can improve the sensing performance of fiber optic sensors.