Experimental study of patterns of energy input into hybrid low pressure discharge for varying RF generator power and argon pressure

Abstract

Patterns of energy release in the plasma of a new modification of RF discharge, viz., hybrid RF discharge, which are maintained by vortex and potential RF electric fields, are experimentally studied. RF power input unit in the form of inductor and capacitor plates connected in parallel are used for initiating this discharge. This paper presents data obtained during the investigation of the influence of power supplied to the plasma and argon pressure on the equivalent resistance of the hybrid discharge, which is the measure of plasma capability of absorbing RF power. The role of the capacitive channel in the balance of RF power supplied to the discharge is considered.