Abstract
Electrochemical discharge machining (ECDM) is one effective way to fabricate non-conductive materials, such as quartz glass and ceramics. In this paper, the mathematical model for the machining process of ECDM was established. Then, sets of experiments were carried out to investigate the machining localization of ECDM with a rotating helical tool on ultra-clear glass. This paper discusses the effects of machining parameters including pulse voltage, duty factor, pulse frequency and feed rate on the side gap under different machining methods including electrochemical discharge drilling, electrochemical discharge milling and wire ECDM with a rotary helical tool. Finally, using the optimized parameters, ECDM with a rotary helical tool was a prospective method for machining micro holes, micro channels, micro slits, three-dimensional structures and complex closed structures with above ten micrometers side gaps on ultra-clear glass.
Highlights
In recent years, Electrochemical discharge machining (ECDM) has gained attention
In all of the following experiments, Φ105 μm tungsten was used as the rotary helical tool and a 600 μm thick graphite plate was selected as the auxiliary electrode
Compared to untreated animals (Figure 1A) while the number of MPO+ cells decreased at 24 h after treatment (Figure 1C)
Summary
Micro electromechanical systems (MEMS), including micro reactors and micro medical devices, often consist of the micro structures of nonconductive materials, such as glass, ceramics and silicon nitride. The traditional machining method is difficult to use to fabricate micro structures composed of brittle and hard nonconductive materials. ECDM can machine micro structures on hard nonconductive materials. ECDM is a hybrid machining method including electrochemical machining and electric discharge machining [1]. Micro structures have been widely applied to micro accelerometers, micro pumps, micro containers and biological medical instruments, which could be machined by electrochemical machining (ECM), electro discharge machining (EDM) or ECDM [2,3,4,5]. ECDM, with a different machining method, can fabricate complex micro structures on glass, such as micro holes, micro channels, micro slits and complicated three-dimensional features
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
