Experimental Study of Flood Gun

Abstract

Using the flood gun is a common and effective way to eliminate the charge buildup, which is mainly used in electron optics based devices such as CD-SEM, X-Ray Photoelectron Spectroscopy (XPS), Auger Electron Spectroscopy (AES), Secondary Ion Mass Spectrometry (SIMS), Electron Probe Micro Analysis (EPMA) and Ion Implanter. The characteristics of the beam play a decisive role in eliminating the effect of charge buildup, which directly determines the effect of using the related equipment. It is difficult to measure accurately and comprehensively the performance of the beam by using the current testing methods for the flood gun. In this paper, a method for measuring beam spot by using a Faraday cup aperture is proposed, and a test system is set up based on this method. Experiments on this test system have successfully achieved accurate and comprehensive measurement of the beam spot performance. The in-depth analysis of the beam spot performance has a guiding significance for the optimization of structural design and installation of the flood gun. At the same time, it contributes to the prediction of the experiment.