Experimental study of fabricating a four-layers Cantor fractal microfluidic chip by CO2 laser system

Abstract

In this paper, we design a four-layers Cantor fractal microfluidic chip and study suitable materials and parameters to fabricate the microfluidic chip. The effect of changing the parameters of CO2 laser processing on different materials is studied by using CO2 laser processing method. Three kinds of materials are selected to process the microchannel. Then, three kinds of laser powers and three kinds of laser moving speeds are selected to form an orthogonal experiment. The better microchannels in the test range are compared by orthogonal experiment. Finally, the method of hot-pressing bonding is used to seal the four-layers Cantor fractal microfluidic chip. The experimental results show that CO2 laser processing plays an important role in the fabrication of microfluidic chips and it is a high efficiency and low-cost method. The combination method of CO2 laser processing and hot-pressing bonding provides a flexible and fast method for the complete fabrication of microfluidic chips.