Abstract
In the cylindrical magnetron the electric field is applied in radial direction and the magnetic field in axial direction. In this paper we present a study of the variations of plasma parameters in both the axial as well as in radial directions in the novel construction of cylindrical magnetron developed in the University of Greifswald, FRG. Six evenly distributed coils create the axial magnetic field. The homogeneity of the magnetic field ±0.2 % has been achieved over the whole discharge vessel length 300 mm (vessel diameter 58 mm). The system is equipped with three cylindrical Langmuir probes movable in radial direction, placed in ports located in between each couple of coils in distance 60 mm from each other. In order to measure the axial variations of the discharge current, one half of the cathode length is segmented into 14 segments, i.e. one segment has a length of about 10 mm. This enables the measurement of the axial variations of the discharge current. We present measurements of the axial distribu...
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