Abstract
Plasmas generated by high voltage, high repetition rate nanosecond pulses have shown potential for a number of applications due to their efficient ionization and production of excited species as well as low power cost. In this work, experimental studies of plasmas generated by 800 V, 2 ns, 10–100 kHz pulses in argon and nitrogen at pressures of 1–10 Torr in a parallel-plate electrode configuration were conducted. A 60 GHz microwave interferometry system was constructed and used to provide time-resolved, spatially-averaged electron number densities in order to study plasma decay between the pulses. Time-resolved voltage and current measurements were also performed.
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