Abstract
Laser-induced fluorescence measurements of the transverse metastable ion velocity distribution function near a negatively biased plate in a low temperature (Te<1eV), low pressure (p0<1mTorr) dc multi-dipole argon discharge plasma have been made with a diode laser. The metastable argon ions in the 3s23p4(P3)3d4F7∕2 state are found to be characterized by a Maxwellian temperature transverse to the direction normal to the plate. For a neutral pressure of 0.3mTorr, the transverse temperature increases along the presheath from 0.026eV in the bulk plasma to 0.058eV at the presheath sheath boundary.
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