Abstract
The continuous reduction in electronic device size at vacuum and atmospheric pressure necessitates appropriate characterization of gas breakdown for device reliability. Traditionally, gas breakdown is driven by Townsend avalanche by Paschen's law. Reducing gap distance at atmospheric pressure creates high electric fields at the cathode that strip electrons by field emission (FE) to ionize neutral gas atoms; the resulting positive space-charge adds to the secondary electron emission1. A matched asymptotic analysis predicts that breakdown voltage decreases linearly with decreasing gap distance when FE drives breakdown. However, a recent theory unifying FE with space-charge limited emission in vacuum (SCLEV) and with collisions predicts that FE will transition directly to SCLEV at ~250 nm for nitrogen.
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