Abstract
The accuracy of tool setting has a great influence on the machining accuracy of micro structures. In this paper, electric breakdown in micro gap is used for tool setting and the accuracy of this method is ±0.2μm. Experimental studies have been done to prove the feasibility of this method. Experimental results show that the breakdown voltage is about 30V when the gap between the tool and the tool setting probe is 2μm, and tool diameter has little effect on this phenomenon. With the increase of the tool wear the breakdown voltage shows ascendant trend, so this method can be used to monitor tool wear.
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