Abstract
To elucidate plasma nonuniformity in high frequency capacitive discharges, Langmuir probe and B-dot probe measurements were carried out in the radial direction in a cylindrical capacitive discharge driven at 90MHz with argon pressures of 50 and 400mTorr. Through the measurements, a significant inductive electric field (i.e., time-varying magnetic field) was observed at the radial edge, and it was found that the inductive electric field creates strong plasma nonuniformity at high pressure operation. The plasma nonuniformity at high pressure operation is physically similar to the E-H mode transition typically observed in inductive discharges. This result agrees well with the theories of electromagnetic effects in large area and/or high frequency capacitive discharges.
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