Abstract
An experimental method of fabrication of a sensor based on a metal–dielectric structure (Al + ZnS) and optimization of its characteristics is described. The coefficient of light reflection (p-polarization) from the aluminum layer is studied as a function of the layer thickness for different angles of incidence at the wavelength of 532 nm. Based on calculations, which are qualitatively consistent with experimental results, a structure consisting of matched layers of aluminum and zinc sulfide is fabricated; this structure has a higher angular resolution than the aluminum film with no dielectric coating. The detection limit of angular measurements by the sensor based on this structure is estimated as 2.6 · 10-5 RIU (refraction index units).
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