Abstract
Digital Phase Shifting Interferometry (PSI) is widely used in optical testing to determine the surface topography of a continuous surface. The height pro??le obtained using PSI is derived from intensity measurements made at different phases, which are seperated by a de??nite phase step. The unreliable piston travel of the peizo in response to a de??nite actuating signal is the main source of phase step and hence height errors in the height pro??le derived using PSI. The ??ve frame sequence suggested by Hariharan et. al. for intensity measurements makes PSI relatively insensitive to both positive and negative phase step errors (as large as 50% of the single desired phase step). However, we report on signi??cant errors in the PSI derived height pro??le that can result if a mathematically equivalent but experimentally different sequence than that suggested by Hariharan et. al. is employed for intensity measurements.KeywordsExperimental MechanicsFrame SequenceOptical TestingInterference MicroscopePhase StepThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
