Abstract
With the advantage of ultrashort pulse width and ultrahigh peak power, subpicosecond lasers can provide extremely precise machining, and therefore has been widely applied in micro and nanoscale manufacturing. We present the results of the experimental parametric study on efficiency, accuracy and quality of subpicosecond laser micromachining of materials, that have a potential for application in innovative devices and technologies. The laser micromachining process was performed with a Yb:KYW subpicosecond laser and a Ti:S femtosecond laser. The study contains a comparison between the two methods, and results analysis using advanced metrology techniques, such as 3D microscopy.
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