Abstract
In this paper, a surface micromachined microwave tunable low pass fllter, consisting of tunable shunt capacitors and series inductors, has been realized. The fllter exhibits insertion loss of less than 1dB (up to 10GHz), stop band attenuation of 20dB at 20GHz, and cut-ofi frequency is changed to 8GHz with the application of DC actuation voltage in the structure. The fllter has an overall dimension of 5:5mm£2mm. The characteristics of tunable fllter are investigated with and without packaging.
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