Abstract
In this paper an experimental investigation of the lateral resolution of a homemade near field microwave microscope (NFMM) is reported. The optimal lateral resolution is studied by a thorough analysis of the influence of critical parameters such as the stand-off distance, the tip apex size and the working frequency. Thanks to the broadband matching network integrated in the interferometer-based NFMM, a high measurement sensitivity is guaranteed at operating frequencies spanning from 2 to 18 GHz. After demonstrating the impact of these key parameters on the lateral resolution improvement. A simple signal processing technique, the position/signal difference (PSD) method, is proposed to further enhance the resolution.
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