Abstract
The ternary Mo-Ga-As phase equilibria have been analyzed using X-ray diffraction, metallography and SEM/EDX, and also DTA. The experimental challenges resulting from low thermal stabilities of Ga-rich phases, steep increase of liquidus temperatures, and especially the high As-vapor pressure are pointed out. These difficulties could be resolved mostly by the summarized interpretation of interrelated data and seven isothermal sections in the range 1300 to 600 °C have been developed. Aternary phase τ (Mo31Ga61As8) was detected and also the five following nonvariant equilibria L + M02AS3 ↔ M05AS4 + GaAs (1167 °C), L + Mo5As4 ↔ Mo3Ga + GaAs (912 °C), L + Mo3Ga + GaAs ↔ τ (883 °C), L + Mo3Ga ↔ “MoGa5” + τ (825 °C), and L + τ ↔ “MoGa5” + GaAs (820 °C). The consistency of all data is confirmed by the development of a complete liquidus surface of the ternary system and the reaction scheme. These are also used to discuss the intersections of condensed phase and gas phase equilibria and the pressure dependence. The experimental study is finally compared to an approximate thermodynamic calculation, and the dominating GaAs-Mo5As4-Mo3Ga solid state equilibrium is confirmed. The phase diagram is also applied to the thermochemical stability of Mo metallizations on GaAs.
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