Abstract
Quartz material is widely used in the automotive industry, aerospace, optical and electronic fields and so on. But quartz is a hard and brittle material, which makes it very difficult to process. Femtosecond laser is applied to micro/nano processing of quartz material due to its excellent performance. This paper uses different energy density femtosecond lasers to process quartz materials and analyzes the surface morphology. The experimental results show that the etching threshold of quartz material is 4.63 J/cm2. The etching depth of the single pulse and the femtosecond laser beam waist radius are 0.005 μm and 8.7 μm, respectively. Besides, there are some granular characteristics on the side wall of etching groove that affect surface quality. The larger the laser power, the more deposits there are.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
