Experimental investigation into Micro Ultrasonic Machining of Quartz

Abstract

Quartz has been broadly applied in industries including electronics, optics, micro electromechanical system (MEMS), biomedical. Micro ultrasonic machining (Micro USM), is a non traditional micro machining technique, extensively used to produce micro features and parts on quartz, silicon, ceramics and glass. A micro tool of stainless steel having diameter 330µm has been develop for generating micro hole on quartz. Experiments have been done by using different types of abrasives like boron carbide, silicon carbide and aluminum oxide of average grain size 14 µm. Experiments have been performed under different parametric setting of tool feed rate and power rating. The range of tool feed rate is 0.8 to 1.1 mm/min. The range of power rating is 200 to 500 W. Micro hole has been generated on quartz. Overcut and taper angle has been considered as response of micro ultrasonic drilling. In the present research effect of tool feed rate and power rating on taper angle and overcut has been investigated while using different type of abrasives.