Experimental investigation and optimization of modification during coaxial waterjet-assisted femtosecond laser drilling

Abstract

Waterjet-assisted laser drilling technology facilitates the fabrication of high-quality micro-holes by utilizing the collaborative benefits of waterjets and lasers. In this study, the coaxial waterjet-assisted laser drilling (CWALD) technique was employed to improve the properties of micro-holes during femtosecond laser drilling. Based on computational fluid dynamics (CFD) simulations, the stability of the waterjet was initially verified by optimizing the structure of the watercourse and nozzle shape in the CWALD device. Furthermore, a comparative experiment between laser direct drilling (LDD) and CWALD revealed that while CWALD can produce well-rounded micro-holes with a high aspect ratio, it exhibits lower efficiency and results in a larger heat-affected zone (HAZ). To address these drawbacks associated with CWALD, a two-step coaxial waterjet-assisted composite laser drilling (TS-CWALD) method was proposed. TS-CWALD involves applying CWALD for secondary modification of micro-hole shape following LDD with punching. This modification process is pivotal for enhancing drilling accuracy but requires consideration of multiple parameters. For this purpose, regression models were established for the inlet diameter, outlet diameter, and taper; response surface methodology was then employed to optimize these parameters. Subsequently, interactive effects analysis was conducted on different responses based on laser pulse energy, frequency, modification speed, and number of modification cycles. The adequacy of the developed models was subsequently verified using analysis of variance methods. Finally, the successful fabrication of a film hole with an inlet diameter of 205 μm and an outlet diameter of 200 μm, featuring a taper of only 0.2°, was achieved ultimately through meticulous parameter optimization. Furthermore, the micro-hole retained a minimal HAZ. The optimized parameters encompassed a pulse energy of 20.6 μJ, frequency of 127 kHz, modification speed of 3 mm/s, and shape modification carried out over 335 cycles.