Experimental exploration of the hydrodynamic effect polishing machinability for different types of material

Abstract

Hydrodynamic effect polishing (HEP), in which the material removal relies on the chemisorption between nanoparticles and the workpiece surface in elastic mode, can realize automatic level smooth surface without surface/subsurface damage. The machinability of different types of optical material (such as monocrystalline silicon and crystalline quartz, amorphous silicate glass, Zerodur and so on) were investigated experimentally. The workpiece surfaces before and after being polished by HEP was observed by atomic force microscopy. The experimental results show the surface roughness of monocrystalline silicon and quartz, amorphous silicate glass have decreased from Rms 0.737nm to Rms 0.175nm, Rms 0.490nm to Rms 0.187nm, Rms 0.469nm to Rms 0.157nm respectively, and meanwhile all the defects and bumpy structures have been removed clearly. However the surface roughness has increased from Rms 0.213nm to Rms 0.321nm with the obvious increment of micro unevenness. By comparison, we can conclude that excellent performance is shown when HEP is applied on the optical material structure with a single monocrystalline or amorphous component. However the ultrasmooth surface cannot be obtained when HEP was applied on the combinational materials such as Zerodur glass. The micro unevenness increases gradually along with polishing process due to the different material removal of the monocrystalline and amorphous component.