Abstract

Perfectly oriented (001), (101), and (111) Pb(Zr0.35Ti0.65)O3 (PZT) films were grown on identical (111)CaF2 substrates by metal-organic chemical vapor deposition. These films exclude domains parallel to the surface; therefore, all domains are actively switchable under the electric field between top and bottom electrodes. Saturation polarization values, Psat(001), Psat(101), and Psat(111), for these PZT films were 75, 50, and 43 μC/cm2, respectively. This orientation dependency was in a good agreement with the theoretical relationship for a tetragonal PZT single crystal, where Psat(001)=Psat(101)/2=Psat(111)/3.

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