Abstract
SUMMARYIt is shown that quantitative light‐element (Z < 10) analysis and κ‐factor determination of light elements can be routinely conducted, analogous to quantification of elements with Z >, using X‐ray energy‐dispersive spectroscopy. The extrapolation technique was used to determine the κ‐factors, κOAI = 0.88 ± 0.10 and κNAI = 1.61 ±0.22 at zero thickness. These values are found to be in good agreement with theoretically calculated κ‐factors. The limitations and applicability of the extrapolation technique for light‐element analyses are discussed. An example of light‐element quantification is provided in the analysis of oxygen segregation to inversion domain boundaries in aluminium nitride.
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