Abstract
An existing 3-D model [Mankelevich et al. Diamond Relat. Mater . 7 (1998) 1133] has been used to explain experimentally measured spatially resolved CH 3 radical number densities in hot filament CVD reactors operating with both CH 4 /H 2 and C 2 H 2 /H 2 process gas mixtures and to examine in detail the process of C 2 ↔C 1 inter-conversion in the gas phase. It has been shown that cooler regions distant from the filament need to be modelled in order to obtain the significant C 2 →C 1 conversion observed in HFCVD reactors with C 2 H 2 /H 2 process gas mixtures. The origin and effect of the non-equilibrated H 2 molecule vibrational state population distribution are studied for the first time in the context of HFCVD reactor models.
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