Experimental characterization of on-chip inductor and capacitor interconnect: part I. series case

Abstract

Detailed experimental investigations described here show the overall characteristics of on-chip inductor and capacitor serial interconnects (L--Cs) on silicon substrates. Using a new equivalent circuit model and the measured S parameters obtained by deembedding techniques, we examine and compare a single inductor, single capacitor, and two sets of series L--Cs. Agreement between the measured and simulated S parameters is excellent. At low frequency, the first resonant frequency f/sub res/ of series L--Cs can be easily determined by f/sub res/=(2/spl pi//spl radic/(LC))/sup -1/, while at high frequency, parasitic parameter effects of both the substrate and the metal strips on f/sub res/ of the L--Cs circuit must be considered.