Abstract
Abstract Low energy ion scattering spectroscopy by a time of flight technique has been used to study both the angular distributions and the charge fractions of particles scattered in collisions of 4 keV Ne+ ions with amorphous silicon. The angular distributions versus the scattering angle at near grazing incidence display for both single (QSS) and total scattering events a shift towards high scattering angles of the ion distribution maximum relative to the neutral curves. The experimental distributions were compared to computer simulation (MARLOWE) profiles for two incidence angles. Ne+ charge fractions versus the scattering angle θ were determined; for near grazing incidence, charge fractions as high as 70% are measured for the QSS event. At a constant scattering angle (θ = 60°), a decrease of the Ne+ charge fraction as a function of the incidence angle is observed; this result illustrates the neutralization probability, inside the target, taking place after the violent collision.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
