Abstract
Abstract A new diagnostic method to measure ion energy distribution using ion reflection on the solid surface, one of the processes of plasma-wall interactions, is proposed. It is well known that the energy distribution of reflected particles is related to the energy distribution of incident ions. This method is used in relatively Iow ion temperature region such as edge plasma in fusion experimental devices. Incident ions to target plate which is inserted in the edge plasma are mainly reflected as neutral particles, and time-of-flight method is utilized to measure energy distribution of reflected particles. Energy distribution of incident ions is deduced by fitting with calculation using Monte Carlo simulation code TRIM.SP. The sheath potential in front of the target can also be obtained with this method.
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