Experimental and Numerical Study of Evaporative Heat Transfer From Ten- Micro Microchannels

Abstract

Experimental and numerical results are presented for evaporative heat transfer from ten-micron square open-top channels. The radial channels are fabricated in epoxy photoresist on a two micron thick silicon membrane. The working fluid is pumped by capillary forces from a reservoir at the edge of the silicon membrane into the channels where it evaporates. The electrical power dissipated in a thin-film heater in the center of the membrane, the conduction heat transfer rate radially out of the membrane, and the rate of evaporation of the working fluid are measured. A three-dimensional finite difference, time-domain integration is used to predict sensible and latent heat transfer rates. Only 5-10% of the energy dissipated as heat in the thin film heater is carried away as latent heat by the evaporating working fluid. Computed temperatures and heat transfer rates are shown to match the experimental results.