Abstract
The rapid advances in high tech industries and the increased demand for high precision and reliability of their production environments call for larger structures and higher vertical vibration performance for high technology facilities. Therefore, there is an urgent demand for structural design and vertical vibration evaluation technologies for high tech facility structures. For estimating the microvibration performance for a cleanroom unit module in high technology facilities, this study performs the scale modeling experiment and analytical validation. First, the 1/2 scale model (width 7500 mm, depth 7500 mm, and height 7250 mm) for a cleanroom unit module is manufactured based on a mass-based similitude law which does not require additional mass. The dynamic test using an impact hammer is conducted to obtain the transfer function of 1/2 scale model. The transfer function derived from the test is compared with the analytical results to calibrate the analytical model. It is found that, unlike for static analyses, the stiffness of embedded reinforcement must be considered for estimating microvibration responses. Finally, the similitude law used in this study is validated by comparing the full-scale analytical model and 1/2 scale analytical model for a cleanroom unit module.
Highlights
Advances in information communication technology and production technology in recent years have increasingly sophisticated high technology products, such as semiconductors, liquid crystal displays (LCD), and optical microscopes
We examined the potential effects of various parameters and input values and found that considering the effect of reinforcement embedded in concrete would reduce error the most
We manufactured a 1/2 smallscale model for the unit modules of a cleanroom based on the mass-based similitude law and tested the model for its dynamic properties
Summary
Advances in information communication technology and production technology in recent years have increasingly sophisticated high technology products, such as semiconductors, liquid crystal displays (LCD), and optical microscopes. High technology facility structures are bound to be largescale in terms of story height, span length, and crosssectional size of members compared to those of general buildings because of production and environmental equipment as well as vibration performance requirements. This study seeks to conduct an experiment to analyze the differences in the actual and analytical measurements so as to develop data for future references for designing microvibration control in high tech facility structures. To this end, we manufactured the 1/2 scale model according to the mass-based scaling method. To validate the similitude law used in this study, the analytic results obtained from both the scale model and prototype are compared
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