Abstract
Aiming to develop a compact and inexpensive in situ cleaning device, an experiment on the removal of hydrocarbon by oxygen and hydrogen plasmas was carried out. The plasmas were produced using a 60 MHz RF-discharge. The oxygen plasma had an electron temperature Te=5 eV and an ion density was 2×10 10 cm -3 with a pressure of 2.3 m Torr and an RF power of 130 W. Observations showed a decrease in the hydrocarbon pressure by about two orders of magnitude after irradiation by the oxygen plasma for about 1 h, though much of the decrease occurred in the first few minutes.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
