Expansion of beam width in exposure and crystal structure beamline (BL09) of SAGA-LS and applications using expanded beams

Abstract

In this study, for high-efficiency experiments of deep X-ray lithography, radiation mutation breeding, and X-ray topography, we expanded the beam width in the exposure and crystal structure beamline (BL09) using a synchrotron beam at the SAGA Light Source facility. BL09 was divided into a straight A-line for hard X-rays and a branch B-line for soft X-rays; however, we reconstructed the new BL09 as a single straight-line by unifying the A and B-lines. Vacuum components, such as a large beam shutter, large beryllium window, acoustic delay line, and monochromator chamber were newly located in the reconstructed BL09. A white (or monochromatic) beam can be switched by removing (or inserting) the monochromator into the beam path as needed. After the reconstruction, the widths of the white and monochromatic beams at the terminal of BL09 were expanded from 110 to 395 mm and from 70 to 128 mm, respectively. The expanded white beam has the width of the world-class in synchrotron radiation facilities. Furthermore, we demonstrated the effect of the expanded beams and improvement in the experimental efficiency through deep X-ray lithography, radiation mutation breeding, and X-ray topography. The use of expanded beams is also expected to lead to the fabrication of practicable fine-structures and provide a deeper understanding of defect structures.