Abstract
3D-nanoprinting via focused electron beam induced deposition (FEBID) is a highly flexible additive-fabrication technique that has gained importance in the past few years for its variable design possibilities on the micro and nanoscale. In this work, we show the transition from mesh-like toward closed (sheet-like) structures and the development of necessary compensations (height correction, temperature compensation, and proximity correction) to minimize deviations between the target structure and the actual deposit. To accomplish this, we investigate the growth behavior, the influence of beam heating, and the electron trajectories in extensive experimental series as well as finite-difference simulations. Out of this, we derive a modular Python tool taking all compensations into account, enabling the controlled and accurate deposition of 3D-nanostructures in an individually adjusted layer-by-layer approach. This approach forms the basis for accurately fabricating closed, sheet-like objects on the nanoscale and lays the foundation for depositing complex nanoarchitectures for various applications in research and development.
Highlights
A range of different 3D-printing methods is available on the macro and microscale, which allow additive manufacturing of complex structures
The working principle relies on a focused electron beam, which, by induced dissociation, immobilizes surfaceadsorbed precursor molecules, that are injected into the microscope vacuum chamber in a gaseous state by a small nozzle in close proximity to the deposition area.[14]
To avoid growth artifacts, such as chair-like surface morphologies, all walls were fabricated in a serpentine manner.[15]
Summary
A range of different 3D-printing methods is available on the macro and microscale, which allow additive manufacturing of complex structures. The controlled navigation of the electron beam in the XY-plane together with defined exposure times per dwell point dictate the final deposit morphology.[15] In particular, slow lateral movement is the key for real 3D architectures as subsequent nanovolumes get vertically deposited with a small lateral displacement This approach is denoted as 3D-FEBID (or 3D-nanoprinting) and allows additive, direct-write fabrication of even complex geometries and evolved into a very powerful and flexible 3D-nanoprinting technology[9] with applications in nanomagnetics,[16,17] plasmonics,[12] and nanoprobe fabrication for scanning probe microscopy,[18,19] to name a few. First steps have already been made[21−23] and impressively proved the general
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