Existence and thermal stability of mono and dihydride phases on Si(1 1 1) and Ge(1 1 1) surfaces: A photoemission study

Abstract

Based on UPS and XPS investigations, it is concluded that a monohydride phase forms at first on the Si(1 1 1)7 × 7 surface. Upon further hydrogen dosing at room temperature, a dihydride phase develops and superposes to the previously formed monohydride phase. The dihydride phase desorbs completely around 250°C and the monohydride phase at about 550°C. A pure dihydride phase obtained by H adsorption cannot be observed on a silicon surface. Silane or disilane adsorption at room temperature exhibits the characteristic features of the dihydride phase without the associated monohydride phase. The obtained phase desorbs at the same temperature as the H induced dihydride phase. That is to our mind the only possibility to obtain a pure dihydride phase.For germanium in careful conditions we observe only a monohydride phase which desorbs at 150°C. For high hydrogen exposures, we obtain a new phase but XPS measurements indicate oxygen contamination. This place desorbs at 225°C and allows clear distinction between H adsorption and contamination. It is concluded that Ge and Si surfaces have different reactivities for hydrogen adsorption. These conclusions are extended to all Ge and Si surfaces either crystallized or amorphous.