Abstract
A technology for the production of fully hybrid microcavities on the basis of Zn(S)Se films and amorphous insulating SiO2/Ta2O5 coatings is proposed. The influence of all stages of the manufacturing cycle on the structure of exciton states in the Zn(S)Se films is demonstrated. This influence is reduced to four main effects: the appearance of a fine structure of emission lines related to free excitons; a decrease in the relative contribution of excitons bound at neutral acceptors to the exciton-emission spectrum; a shift of the emission lines related to exciton–impurity complexes and free excitons to lower frequencies; and a decrease in the splitting between emission lines related to heavy and light excitons. Samples of fully hybrid microcavities, in which the high structural and optical quality of Zn(S)Se films is retained, are fabricated.
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