Abstract
We demonstrate the use of laser ionization mass spectroscopy for the sensitive and selective detection of organometallic precursors of III–V and II–VI semiconductors. With picosecond laser excitation, the parent molecular ion, even of unstable compounds, can be detected with high relative abundance. Excimer laser photoproducts of organometallic compounds can also be identified. This is shown for the example dimethylditelluride CH 3TeTeCH 3.
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