Abstract

Exchange bias has been studied in various Ni50Mn36.8Sb13.2/CrN heterostructures with different CrN thicknesses (15 nm–80 nm), grown on Si (100) substrate using magnetron sputtering. The shift in hysteresis loop up to 51 Oe from the origin was observed at 10 K for Ni-Mn-Sb film without CrN layer. On the other hand, a significant shifting of hysteresis loop was observed with antiferromagnetic (AFM) CrN layer in Ni50Mn36.8Sb13.2/CrN heterostructure. The exchange coupled 140 nm Ni50Mn36.8Sb13.2/35 nm CrN heterostructure exhibited a relatively large exchange coupling field of 148 Oe at 10 K compared to other films, which may be related to uncompensated and pinned AFM spins at FM-AFM interface and different AFM domain structures for different thicknesses of CrN layer. Further nanoindentation measurements revealed the higher values of hardness and elastic modulus of about 12.7 ± 0.38 GPa and 179.83 ± 1.24 GPa in Ni50Mn36.8Sb13.2/CrN heterostructures making them promising candidate for various multifunctional MEMS devices.

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