Abstract
Abstract Excess noise and specific resistivity of conducting patterns induced in HPR-204 (Hunt's Positive Resist) films by 1.5 MeV argon ion bombardment were investigated. Departure from saturation of the specific resistivity at the highest dose of 1017 cm-2 was observed and a large decrease in excess noise was found when the dose was increased from 1015 to 5 × 1016 cm-2. Deviations from the square-law dependence on current of the excess noise were also observed at low and high doses.
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