Abstract

Gas flows in micro-electro-mechanical systems (MEMS) owing to the small size of the systems possess a relatively large Knuden number and usually belong to the slip and transitional flow regimes. This paper employs three schemes, namely the direct simulation Monte Carlo (DSMC) method, information preservation (IP) method, and the lattice Boltzmann method (LBM), to simulation micro-channel flows at three Knudsen numbers (Kn) of 0.0194, 0.194 and 0.388. The present LBM results are in agreement with those given by Nie et al. (2002), whereas they significantly differ from the DSMC (and IP) results as Kn increases. This suggests that the present version of LBM is not feasible to simulate the micro-channel flows in transition regime.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.